trench probe fiber array
PRODUCT OVERVIEW
Trench probe fiber array units (FAUs) provide a means of testing Silicon Photonic chip die at wafer level. The arrays are used with the fibers in a near-vertical orientation with the wedge-shaped tip inserted into an etched trench in the die. The free-space beams from the fibers exit horizontally for coupling to exposed edge waveguides after mirror reflection or TIR. The tip (wedge) angle of the arrays is typically around 50° and they can be designed for trenches as small as 50µm wide by 50µm deep. They can be made using common SM or PM fiber types.
SPECIFICATIONS
V-Groove Material: Fused Silica, Borosilicate¹
Fiber: Any common SM or PM fiber
Channel: 1, 2, 4, 8, or 16 fibers¹
Fiber Pitch/Spacings: 127µm, 250µm, and 254µm standard¹
Standard Size: V-Groove thickness: 1.5mm; Lid thickness: 200µm (polished through into fiber cladding at the tip)
Near-Vertical Fiber Angle: 8° or 4° from top surface normal¹
Probe Tip Angle: Typically around 50°, depending on the desired geometry, near-vertical angle, and use of index-matching fluid
Reflection Type: Metallized mirror or TIR
Connectors: FC/PC, FC/APC, MT (others available)
¹Custom specifications available
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